Low-thermal-budget Synthesis Of Monolayer Molybdenum Disulfide For Silicon Back-end-of-line Integration On A 200mm Platform

Zhu J., J.-H. Park, S. A. Vitale, W. Ge, G. S. Jung, J. Wang, M. Mohamed, T. Zhang, M. Ashok, M. Xue, X. Zheng, Z. Wang, J. Hansryd, A. P. Chandrakasan, J. Kong, T. Palacios, "Low-thermal-budget Synthesis of Monolayer Molybdenum Disulfide for Silicon Back-end-of-line Integration on a 200mm Platform," Nature Nanotechnology, Apr. 2023.