Small-Area, Resistive Volatile Organic Compound (VOC) Sensors Using Metal-Polymer Hybrid Film Based On Oxidative Chemical Vapor Deposition (oCVD)

Wang, X., S. Hou, H. Goktas, P. Kovacik, F. Yaul, A. Paidimarri, N. Ickes, A. P. Chandrakasan, K. Gleason, “Small-Area, Resistive Volatile Organic Compound (VOC) Sensors Using Metal-Polymer Hybrid Film Based on Oxidative Chemical Vapor Deposition (oCVD),” ACS Applied Materials & Interfaces, pp.16213-162222, 2015 7 (30), July 2015.