A 500-MS/s, 5-b analog-to-digital converter (ADC) is implemented in 65nm CMOS technology. The ADC has six time-interleaved successive approximation register (SAR) channels that consume 6 mW from a 1.2 V supply. The ADC is the first implementation of the split capacitor array, replacing the conventional binary-weighted capacitor array of a SAR converter. The new array is faster and lower power without any degradation in linearity.